单晶生长过程的自适应控制

Self Adaptive Control of Silicon Monocrystalline Growing Process

  • 摘要: 本文讨论了对象特性缓慢时变,并具有确定性扰动和随机干扰作用下的单晶生长过程的自适应控制.对采用广义最小方差控制的自校正控制器及引入前馈信号而使系统具有较好的品质指标进行了分析.介绍应用DJS-131型计算机实现的“过程-FORTRAN-Ⅳ自校正控制在线软件包”在TDR-60型单晶炉单晶生长过程实时控制的初步结果.

     

    Abstract: In this paper,a self adaptive control system of silicon monocrystalline growingprocess is discussed which is slowly time varying and also subject to both determinate and stochastic disturbances.Analysis is made of the improved system performance indices resulting from employment of generalized.minimum variance strategyand introduction of a certain signal.The self adaptive and real time control of silicon monocrystalline growing process in TDR-60 furnace is described by means ofDJS-131 minicomputer-based on line self tuning "Process-Fortran-Ⅳ Package",thepriliminary results of which are shown briefly.

     

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