Ⅲ-Ⅴ族半导体平面波导谐振腔滤波器

Ⅲ-ⅤSemiconductor Planar Waveguide Resonator Filters

摘要: 基于四端口谐振腔滤波理论，采用3D时域有限差分法（3D-FDTD）结合完全匹配层（PML）边界条件，对并联矩形驻波型谐振腔和并联环行行波型谐振腔滤波器进行了数值仿真和优化设计．所制作的GaAlAs/GaAs平面波导四矩形并联驻波型谐振腔滤波器、单环行波型谐振腔滤波器和三环并联行波型谐振腔滤波器的测试结果与仿真结果符合较好．

Abstract: Based on four-port resonator filter theory,parallel rectangular standing wave and parallel round traveling wave resonator optical filters are simulated and optimized using 3D-FDTD(three dimensional finite-difference time-domain) method on PML(perfectly matched layer) boundary condition.GaAlAs/GaAs planar waveguide filters based on four-parallel-rectangle standing wave resonator,on single ring traveling wave resonator and on three-parallel-ring traveling wave resonator are tested.The measurement result is in accordance with the computation well.