半导体制造系统仿真调度中的优化方法

OPTIMIZATION METHODOLOGY IN SIMULATION BASED SCHEDULING FOR SEMICONDUCTOR MANUFACTURING

  • 摘要: 基于仿真的调度方法通常需要进行大量的仿真或者采用好的规则以优化调度结果.本文建立了以减小平均在制品为优化目标的半导体制造系统的调度模型,对模型进行分解和简化.把结论作为一个调度规则直接应用于仿真调度方法.由于充分利用了系统全局的状态信息,可以有效地减少仿真的次数,提高了仿真调度的优化能力.

     

    Abstract: Extensive simulations and good scheduling rules are usually necessary to obtain the optimal schedule in the simulation-based scheduling methods. We present a methodology to build a decomposable model for scheduling the semiconductor manufacturing systems, with the objective of minimizing the average WIP. The model is decomposed and further simplified in the context of semiconductor manufacturing. The conclusion can be directly applied to simulation-based scheduling as a scheduling rule. Because it uses the global state information in decision, the optimization ability and performance of simulation based scheduling are improved without increasing the simulation runs.

     

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