一类无公害高精度控温系统的分析与综合
Analysis and Synthesis of A Precision Temperature Control System Not Producing Environmental Pollution
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摘要: 本文结合TDR-60型单晶炉控温系统，从高控温精度和不产生电网污染的公害的要求出发，讨论了采用磁性调压器作为功率部件的一类电加热设备控温系统的方案构成，关键元件和部件的选择与设计．并讨论了调节器的参数整定问题．Abstract: From the viewpoint of not producing environmental pollution and with TDR-60 monocrystalline silicon furnace as the actual example,a new type of temperature control system for electric heaters,in which magnetic voltage regulator is adopted as the actuating element,is proposed in this paper.Structure scheme,design and selection of key parts and components are explained along with the discussion of parameter adjusutment problems.
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