Scheduling of Single-armed Cluster Tools with Emergency Order Insertion

LI Jincheng; PAN Chunrong

doi:10.13976/j.cnki.xk.2023.2303

Volume 52 Issue 5

Oct. 2023

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INFORMATION AND CONTROL > 2023 > 52(5): 626-637. > DOI: 10.13976/j.cnki.xk.2023.2303 CSTR: 32166.14.xk.2023.2303

LI Jincheng, PAN Chunrong. Scheduling of Single-armed Cluster Tools with Emergency Order Insertion[J]. INFORMATION AND CONTROL, 2023, 52(5): 626-637. DOI: 10.13976/j.cnki.xk.2023.2303

Citation:

LI Jincheng, PAN Chunrong. Scheduling of Single-armed Cluster Tools with Emergency Order Insertion[J]. INFORMATION AND CONTROL, 2023, 52(5): 626-637. DOI: 10.13976/j.cnki.xk.2023.2303

Citation:

LI Jincheng, PAN Chunrong. Scheduling of Single-armed Cluster Tools with Emergency Order Insertion[J]. INFORMATION AND CONTROL, 2023, 52(5): 626-637. DOI: 10.13976/j.cnki.xk.2023.2303

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Scheduling of Single-armed Cluster Tools with Emergency Order Insertion

LI Jincheng,
PAN Chunrong^,

School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China

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Received Date: July 04, 2022
Revised Date: November 15, 2022
Accepted Date: October 25, 2022
Available Online: October 22, 2023

Graphical Abstract

Abstract

Abstract

Urgent order insertion frequently occurs in the production process when the wafer manufacturing mode is changed to multi-variety and small batch. Such an unreasonable scheduling strategy reduces the production efficiency of cluster tools. Thus, in this study, we examine the scheduling problem of single-arm cluster tools faced with urgent order insertion under the constraints of wafer residence time so as to improve the production flexibility of cluster tools. For this, we first analyze the processing process of the urgent insertion order. Then, we propose the scheduling rules of the robot for single-arm cluster tools to realize the scheduling of the processing process. The schedulability judgment conditions are derived for two kinds of machining states caused by different machining parameters, respectively. Accordingly, the mathematical analytical formula for solving the waiting time of the robot is derived. Finally, an optimal scheduling algorithm is proposed for cluster tools in the face of urgent order insertion, and the effectiveness of the scheduling method is verified by an example and comparison analysis.
- semiconductor manufacturing,
- cluster tool,
- time constraint,
- urgent order

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References (20)

References

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