An Expert System Based Virtual Process System for MEMS

Virtual process is one part of rapid prototype manufacturing,which emulates process and displays 3D visualization,based on design of layout,definition of layer and process file.This paper introduces the technology of ES(expert system)that abstracts the existing knowledge into rules.The inference engine is separated from the repository,so it is easier to extend the system.At the end,an actual example is given to show the feasibility of this method.