SUBMICRO-POSITIONING SYSTEM BASED ON MULTI-DIMENSIONALULTRAPRECISE MICRO ACTUATORS

In this paper, an approach is presented to resolve confliction between speed adjustment and system oscillation in a submicro-positioning by using PID and FUZZY controlling method. A coordinate transformation is applied to minimization the inter-axial interference in the multi-dimensional submicro-actuator positioning system. In the experiment, the composition for the control system is made of three linear motors and three submicro-actuators, with is capable of realizing the positioning of a wide range and submicro precision.