Analysis and Synthesis of A Precision Temperature Control System Not Producing Environmental Pollution

From the viewpoint of not producing environmental pollution and with TDR-60 monocrystalline silicon furnace as the actual example,a new type of temperature control system for electric heaters,in which magnetic voltage regulator is adopted as the actuating element,is proposed in this paper.Structure scheme,design and selection of key parts and components are explained along with the discussion of parameter adjusutment problems.