Self Adaptive Control of Silicon Monocrystalline Growing Process

In this paper,a self adaptive control system of silicon monocrystalline growingprocess is discussed which is slowly time varying and also subject to both determinate and stochastic disturbances.Analysis is made of the improved system performance indices resulting from employment of generalized.minimum variance strategyand introduction of a certain signal.The self adaptive and real time control of silicon monocrystalline growing process in TDR-60 furnace is described by means ofDJS-131 minicomputer-based on line self tuning "Process-Fortran-Ⅳ Package",thepriliminary results of which are shown briefly.