SHOP FLOOR CONTROL IN THE SEMICONDUCTOR MANUFACTURING

Due to the high profitability and strong competition in the semiconductor manufacturing, it is very popular to research the complexity of its production lines, especially the complex control in its shop floor. The production line of semiconductor manufacturing is highly different with job-shop line and flow-shop line because of its long, non-acyclic and random process flow and diverse features of machines. So, it is a great challenge for researchers in academia and industry to effectively manage it. In this paper, we summarize main research results and applications in recent years using classification of features of machines, control problems and approaches.